Micro-Electro-Mechanical Systems (MEMS) is the integration of
mechanical elements, sensors, actuators, and electronics on a
common silicon substrate through microfabrication technology. While
the electronics are fabricated using integrated circuit (IC)
process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the
micromechanical components are fabricated using compatible
"micromachining" processes that selectively etch away parts of the
silicon wafer or add new structural layers to form the ...
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许多MEMS器件，像加速度计、机械共振器件等，都需要在真空环境下才能实现设计功能。然而检验封装腔体是否达到了所要求的真空程度一直一来都是个棘手的问题。密歇根大学Khalil
Najafi教授研究小组的研究人员最近开发出一种用微机械制造方法实现，可以在封装的封帽上完成皮拉尼真空测量的方案。使用这种方法可以完成封装的
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